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滾針電動(dòng)缸
什么是滾針電動(dòng)缸? What is Million Actuator

滾針電動(dòng)缸是一種直線運(yùn)動(dòng)電動(dòng)缸，采用艾塞路獨(dú)創(chuàng)的滾針式導(dǎo)柱“精密滾針導(dǎo)柱”。

精密滾針導(dǎo)柱采用滾針作為滾動(dòng)體，實(shí)現(xiàn)了高精度的直線性。因此，滾針電動(dòng)缸是一種具有3個(gè)“1μm”的高精度、高剛性直線運(yùn)動(dòng)電動(dòng)缸。

Million Actuator is a linear actuator that ISEL original roller type guide “Million Guide” is equipped inside. The “Million Guide” adopts needle rollers as rolling elements, and obtains the high precision linear travelling. Million Actuator holds the accuracy of three kinds of“1 micron”with high precision and high rigidity.

采用高剛性、高精度滾針式直線運(yùn)動(dòng)導(dǎo)柱“精密滾針導(dǎo)柱”
High Rigidity & High Precision Roller type linear motion guide “Million Guide”equipped inside.
從點(diǎn)到線 Point to Line
采用滾珠時(shí)(滾珠型)
Ball case (Ball type)
點(diǎn)接觸
Point contact
接觸面積小
Small contact area
采用滾針時(shí)(精密滾針導(dǎo)柱)
Roller case (Million Guide)
線接觸
Line contact
接觸面積大
Small contact area
3個(gè)“1μm” Three kinds of“1μm!”
剛性1μm
1μm“Rigidity”
進(jìn)給精度1μm
1μm“Feed Accuracy”
直進(jìn)性1μm
1μm“Linear Travelling”
用途 Applications
反射鏡和透鏡微調(diào)
Minute adjustment of the Mirror and Lens
對準(zhǔn)臺X?Y?θ軸調(diào)整
X/Y/θ axis adjustment of the Alignment stage
相機(jī)對焦
Camera Focus
試驗(yàn)裝置
Test equipment
感應(yīng)器調(diào)整
Sensor adjustment
Z 軸平臺定位
Z axis stage positioning
  • 步進(jìn)曝光機(jī)等各種光學(xué)設(shè)備的透鏡和反射鏡 移動(dòng)、微小角度調(diào)整
  • 對準(zhǔn)臺 X?Y?θ軸調(diào)整
  • 相機(jī)、感應(yīng)器位置調(diào)整
  • Lens and mirror movement, minute angle adjustment of optical instruments like the stepper etc
  • X/Y/θaxis adjustment of the alignment stage
  • Positioning adjustment of the camera and sensor
  • 顯微鏡、望遠(yuǎn)鏡的透鏡和反射鏡調(diào)整
  • 工作臺定位
  • 半導(dǎo)體、液晶制造裝置
  • 各種自動(dòng)設(shè)備、試驗(yàn)裝置等
  • Lens and mirror adjustment of the microscope/ telescope
  • Table positioning
  • Manufacturing equipment of the semiconductor and liquid crystal
  • Automatic machine and test equipment etc.
滾針電動(dòng)缸實(shí)現(xiàn)剛性1μm※1
Million Actuator has 1μm Rigidity

采用高精度的寬幅滾針，剛性比原來的滾珠類型提高了10倍以上。

High precision wide roller realizes over 10 times rigidity compared to the conventional ball type.

接觸面積比較
Comparison of Contact Area
精密滾針導(dǎo)柱接觸面積大， 實(shí)現(xiàn)了高剛性。
Million Guide realizes high rigidity for its large contact area.
采用滾珠時(shí)(滾珠型)
Ball case (Ball type)
點(diǎn)接觸
Point contact
接觸面積小
Small contact area
采用滾針時(shí)(精密滾針導(dǎo)柱)
Roller case (Million Guide)
線接觸
Line contact
接觸面積大
Small contact area
側(cè)壓剛性彎曲比較
Comparison of Lateral Pressure Deflection (Rigidity)
精密滾針導(dǎo)柱采用事例 Application examples of Million Guide
精密滾針導(dǎo)柱，由于其高剛性在以下這些地方也被廣泛使用。
Million Guide is used for the following applications by its high rigidity.
馬達(dá)鐵芯的沖切模具 Punching Die of Motor core
TAB膠帶沖切模具 Punching Die of TAB tape

※1根據(jù)使用條件數(shù)值可能會(huì)有所不同。 ※1 Values may vary by the applications/conditions.

滾針電動(dòng)缸的送給精度1μm※1
Million Actuator has 1μm Feed Accuracy

使用高精度的寬幅型的滾針、保持剛性的同時(shí)成功實(shí)現(xiàn)了低負(fù)荷。 因此滾動(dòng)阻力被抑制到極限，達(dá)到了1μm進(jìn)給精度。
利用這個(gè)高進(jìn)給精度、在曝光機(jī)的鏡頭 · 鏡片 · 平臺的高精度定位等方面精密滾針導(dǎo)柱被廣泛使用。

ISEL has succeeded in low preload with keeping rigidity by using high precision wide rollers. Million Guide has achieved 1 micron feed accuracy by minimizing the rolling resistance to the limit. For its high feed accuracy, Million Guide is adopted for high precision positioning of the mirror, lens and table of the exposure machine.

滾針式的優(yōu)點(diǎn)
Advantages of Roller type
滾珠循環(huán)式的場合
Circular ball type

滾珠之間相互接觸、碰撞而產(chǎn)生的摩擦，造成磨損、臟污、 發(fā)熱等。另外，循環(huán)時(shí)負(fù)荷的加壓、減壓反復(fù)發(fā)生。非常容 易造成振動(dòng)。

Ball contact/ collision makes friction, leading to wear, dust and heat emission. The preload off and on are repeated at the ball circulation, and it makes one of major vibration factors.

精密滾針導(dǎo)柱(滾針)的場合
Million Guide (Roller type)

滾針之間相互不接觸,不會(huì)發(fā)生轉(zhuǎn)動(dòng)體的接觸、碰撞、摩擦。 另外，因?yàn)槭欠茄h(huán)、低負(fù)荷，不會(huì)造成加壓時(shí)沖擊、振動(dòng)也 減少。能夠?qū)崿F(xiàn)順暢、微小的送給。

Rollers do not contact each other, and no contact, collision and friction occurs to rolling elements. No circulation and low preload structure makes less entry impact and vibration, and is smooth and ideal for minute feeding.

超低振動(dòng)支撐著高進(jìn)給精度
Ultra low vibration supporting high dynamic accuracy

和滾珠類型相比，滾針導(dǎo)柱到達(dá)1/20 以下的低振動(dòng)! 對于微小進(jìn)給量最合適!

Dynamic accuracy ensured by low vibration under 1/20 compared to that of ball type.

響應(yīng)速度支撐著1μm的進(jìn)給精度
Tracking ability supporting 1μm feed accuracy

將滾動(dòng)阻力控制到極限、把0.1μm為1單位的微小進(jìn)給量變成可能，實(shí)現(xiàn)了卓越的響應(yīng)速度。

Million Guide holds excellent tracking ability to enable minute feeding of 0.1 micron unit by minimizing the rolling resistance to the limit.

指定脈沖信號 (pls) Command pulse (pls)
※GMA2815M中無負(fù)荷時(shí)數(shù)據(jù)?！鵗he data at no load on GMA2815M.
※1μm的進(jìn)給精度表示可以以1μm為單位進(jìn)行微小進(jìn)給。進(jìn)給方向的重復(fù)定位精度在 ±1.0μm以下。本數(shù)值不包含滾珠絲杠的導(dǎo)程誤差，因此在所有行程之間會(huì)加上滾珠絲杠導(dǎo)程誤差。 數(shù)值可能會(huì)因使用條件而異。
※1“1 micron feed accuracy”means that minute feeding of 1 micron unit is possible with our Million actuator. Repetitive positioning accuracy is less than ±1.0 micron in the feed direction. This value does not include the lead error of ball screw; considering the range of whole stroke, the lead error of ball screw needs to be added to this. Values may vary by the applications/ conditions.
滾針電動(dòng)缸的直進(jìn)性1μm※1
Million Actuator has 1μm Linear Travelling

實(shí)現(xiàn)了高剛性、低振動(dòng)的滾針導(dǎo)柱具有良好直線性、特別是往復(fù)運(yùn)動(dòng)精度比原來提高3倍 以上。利用這個(gè)特性、應(yīng)用于微細(xì)的PCB基板開孔、半導(dǎo)體的組裝等,在精密半導(dǎo)體領(lǐng)域 被廣泛使用。

Million Guide realizes excellent linear travelling, with features of high rigidity and low vibration. Million Guide repeatability, in particular, is over 3 times as accurate as that of conventional one. For its advantage, Million Guide is widely adopted in the field of precision semiconductor, like minute drilling on PCB and semiconductor mounting etc.

X·Y軸全方向 往復(fù)運(yùn)動(dòng)精度比較
Comparison of Repeatability:X/Y directions

振動(dòng)大、剛性低的滾珠導(dǎo)柱的話，位置精度偏差大不穩(wěn)定。滾針氣缸的話，振動(dòng)小并且到達(dá)很好的往復(fù)運(yùn)動(dòng)精度!

Affected by vibration, low-rigidity ball type has larger variation in positional accuracy. Million Actuator realizes excellent repeatability for its low vibration feature.

X·Y·Z軸全方向 重復(fù)定位精度比較
Repetitive Positioning Accuracy:X/Y/Z directions

高精度滾針導(dǎo)柱和滾珠絲杠的配套組合，滾針氣缸的重復(fù)定位精度實(shí)現(xiàn)了X·Y·Z全方向±1.0μm!

Combination of high precision Million Guide and ball screw makes the repetitive positioning accuracy of Million Actuator within ± 1.0μm in X/Y/Z directions.

采用滾針電動(dòng)缸的優(yōu)點(diǎn)
Merits of Adopting Million Actuator
1.
超高精度化
Ultra High Precision
成功實(shí)現(xiàn)了以前不可能達(dá)到的1μm單位高精度定位，提高了產(chǎn)品精度!
Improves product accuracy by high precision positioning of 1μm unit, which has been impossible before.
2.
節(jié)省空間
Space Saving
簡易構(gòu)造，節(jié)省空間!
Compact structure does not take much room.
3.
減少工時(shí)
Workload Reduction
一體化構(gòu)造，縮短客戶設(shè)計(jì)時(shí)間!
Integral construction reduces the customer’s device design time.
安裝簡單，縮短組裝時(shí)間!
Easy installation shortens assembly time.
本體外側(cè)上裝備有自動(dòng)開關(guān)。 → 調(diào)整開關(guān)位置很容易，節(jié)省空間。
Auto switch is equipped standard on the outside body. → Easy switch position adjustment, and space saving.
有帶電機(jī)和不帶電機(jī)兩種類型。客戶可指定電機(jī)。 → 結(jié)合客戶的控制樣式、要求等，也可代為選定電機(jī)。
Motorless specification is also in standard line-up, as well as the specification with motor. The specified motor type can be equipped that the customer wants. → You can select the motor according to your control specifications and demand/request.
滾針電動(dòng)缸標(biāo)準(zhǔn)的訂單型號 Order type of Standard Million Actuator
外形尺寸圖 Dimensional Outline Drawing
GMA2010
※虛線處是標(biāo)準(zhǔn)電機(jī) ※Broken line part means standard motor.
GMA2815
※虛線處是標(biāo)準(zhǔn)電機(jī) ※Broken line part means standard motor.
GMA4220
※虛線處是標(biāo)準(zhǔn)電機(jī) ※Broken line part means standard motor.
GMA6025
※虛線處是標(biāo)準(zhǔn)電機(jī) ※Broken line part means standard motor.
  • 上述規(guī)格如有變更，恕不另行通知。
  • The above specifications are subject to change without advanced notice.
電機(jī)圖紙?zhí)峁┦纠缦?/b> Examples of motor drawings to be provided are as follows
GMA2010 電機(jī)類型
GMA2010 Motor Type
D
15
16
GMA2815 電機(jī)類型
GMA2815 Motor Type
L
20
15
GMA4220 電機(jī)類型
GMA4220 Motor Type
D
φ5
φ6
GMA6025 電機(jī)類型
GMA6025 Motor Type
d D P
φ6.35 φ38.1 47.14
φ10 φ36 50
正式產(chǎn)品/標(biāo)準(zhǔn)式樣 滾針電動(dòng)缸(GMA系列)式樣(搭載電機(jī)使用時(shí)的參考值) Line-up / Standard Specifications Million Actuator (GMA Series) Specifications (Reference values when using the equipped motors)
名稱Product name 滾針電動(dòng)缸 Million Actuator
型號 Type GMA2010 GMA2815 GMA4220 GMA6025
安裝角落 Installation width 20×20mm 28×28mm 42×42mm 60×60mm
有效行程※3 Effective stroke 10mm 15mm 20mm 25mm
軸方向推力※1
Axial thrust
額定
Rating		 30N 50N 150N 300N
瞬間最大
Instantaneous maximum		 60N 100N 250N 500N
送給速度※1
Feed speed
額定
Rating
10mm/sec(電機(jī) 600min-1 時(shí))
10mm/sec(In case of Motor 600min-1)
15mm/sec (電機(jī) 450min-1 時(shí))
15mm/sec(In case of Motor 450min-1)
20mm/sec (電機(jī) 400min-1 時(shí))
20mm/sec(In case of Motor 400min-1)
瞬間最大
Instantaneous maximum
50mm/sec(電機(jī) 3000min-1 時(shí))
50mm/sec(In case of Motor 3000min-1)
100mm/sec(電機(jī) 3000min-1 時(shí))
100mm/sec(In case of Motor 3000min-1)
100mm/sec(電機(jī) 2000min-1 時(shí))
100mm/sec(In case of Motor 2000min-1)
送給絲杠 Feed screw 精密研磨滾珠絲杠 Precision ground ball screw
絲杠導(dǎo)線 Screw lead 1mm 2mm 3mm
重復(fù)定位精度
Repetitive positioning accuracy		 ±1.0μm
空轉(zhuǎn) Lost motion 3.0μm
分辨率 Resolution 0.1μm/pls※2 0.1μm/pls※2 0.2μm/pls※2 0.3μm/pls※2
搭載標(biāo)準(zhǔn)電機(jī)(參考)
Standard motor(Reference)		 (株)三明步進(jìn)電機(jī) Si servo(附帶編碼器) Stepping motor Si Servo (with encoder) made by Sanmei Co., Ltd.
TS3692N61S02TS3641N61S02TS3617N370S04TS3653N324S04
電源電壓 Power supply voltage DC24V±10%
感應(yīng)器 Sensor 無
磁性接近感應(yīng)器 附帶2個(gè)(ASA電子工業(yè)(株)制 ACH02RW)
Magnetic proximity switches 2 pcs (ACH02RW made by ASA Electronics Industry)
重量 約0.25kg Approx.0.25kg 約0.4kg Approx.0.4kg 約1.3kg Approx.1.3kg 約3.7kg Approx.3.7kg
使用溫度范圍
Operating temperature range 		0~50°C
  • ※ 搭載電機(jī)使用時(shí)的注意事項(xiàng)參考:
  • ※1 請不要長時(shí)在最大推力或最大速度下使用?？赡軙?huì)造成滾珠絲杠的壽命顯著下降，最大推力或最大速度請?jiān)谒矔r(shí)使用。
  • ※2 電機(jī)編碼器的分辨率設(shè)定為10000pls/rev時(shí)的值。
  • ※3 請?jiān)谘b置側(cè)安裝擋塊等，確保其動(dòng)作時(shí)不會(huì)超過有效行程。
  • ※ 上面數(shù)據(jù)是帶有標(biāo)準(zhǔn)電機(jī)時(shí)的數(shù)據(jù)。
  • ※ 重量中包含標(biāo)準(zhǔn)電機(jī)的重量(不含電纜重量)。
  • ※ 上面重復(fù)定位精度數(shù)據(jù)要求絲杠的溫度是固定的。(不考慮周圍?絲杠溫度變化帶來的影響 )
  • ※Precautions when using the equipped motors:
  • ※1 Do not operate under the maximum thrust/ speed at all times, or the ball screw life could be significantly shortened; The maximum thrust/ speed operation should be limited to instantaneous use.
  • ※2 Values at resolution set of motor encoder“10000pls/rev”
  • ※3 Install a stopper etc. on the device side so that it does not run beyond its effective stroke.
  • ※ It is the data with the standard motor equipped.
  • ※ The weight includes the standard motor. (Cable weight is excluded.)
  • ※ The repetitive positioning accuracy is limited under the condition where the actuator temperature is constant. (The influence is not considered by environmental/ actuator temperature change.)